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272 pages • missing pub info (editions)
ISBN/UID: 9781848000209
Format: Hardcover
Language: English
Publisher: Springer
Publication date: 01 January 2008
Description
Applications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 105, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate me...
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272 pages • missing pub info (editions)
ISBN/UID: 9781848000209
Format: Hardcover
Language: English
Publisher: Springer
Publication date: 01 January 2008
Description
Applications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 105, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate me...
Community Reviews
Content Warnings