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272 pages • missing pub info (editions)
ISBN/UID: 9781849967044
Format: Paperback
Language: English
Publisher: Springer
Publication date: 21 October 2010
Description
Applications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 105, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate me...
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Content Warnings
272 pages • missing pub info (editions)
ISBN/UID: 9781849967044
Format: Paperback
Language: English
Publisher: Springer
Publication date: 21 October 2010
Description
Applications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 105, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate me...
Community Reviews
Content Warnings